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 Expert  107921

Expert in Thin Film Science and Technology

Available for your Consulting and Expert Witness Needs

Georgia (GA)
Education Work History Career AccomplishmentsPublicationsConsulting Services Expert Witness

Summary of Expertise: Listed with other top experts in: 
THIN FILM APPLICATIONS; THIN FILM INTEGRATED CIRCUIT. The majority of Expert's academic, industrial, and research experience has been thin film science and technology. Although most of his experience has been in the microelectronics (semiconductor) industry, he has applied his knowledge to many industries that utilize films and coatings (solar cells, flat panel displays, and corrosion). His work has focused on processing, structure, and property relationships of thin films and coatings, and on surface cleaning and modification.

LOW TEMPERATURE PLASMA; PLASMA ENHANCED CVD; SPUTTER ETCHING. Expert's work in films and coatings has primarily utilized plasmas or glow discharges to etch, deposit, or modify films or coatings. These efforts have concentrated on understanding how plasma parameters (power, pressure, frequency) control film etch or deposition rates, film properties (especially electrical, chemical, and physical), structure, etch profiles, and selectivity. The use of high density plasma sources for film processing are also being explored.

MICROELECTRONIC THIN FILMS APPLICATIONS; SEMICONDUCTOR PROCESSING. Expert's industrial experience were in the semiconductor industry where he was responsible for research, development, and production aspects of integrated circuit fabrication. He worked on characterization of semiconductor, metal, and dielectric surfaces and interfaces by various electrical and analytical techniques. Other methods he used include oxidation, diffusion, photolithography, metallization, ion implantation, radiation damage, passivation of surfaces, plasma processes, and chemical vapor deposition.


chemical vapor deposition




integrated circuit


ion etching


low-temperature plasma


microelectronics thin-film application


plasma spraying


plasma-enhanced chemical vapor deposition


plastic film


semiconductor material processing


semiconductor metallizing


semiconductor passivation


thin film


thin-film application


thin-film electrical property


thin-film integrated circuit


thin-film technology


thin film science

Show Secondary and Basic Areas of Expertise
Expert may consult nationally and internationally, and is also local to the following cities: Atlanta, Georgia;  Columbus, Georgia;  Athens, Georgia;  Macon, Georgia;  Roswell, Georgia;  Marietta, Georgia;  and Chattanooga, Tennessee.

Often requested
with this expert:

Magnetron Cathode Design, Magnetic Field Modeling, PVD,...
Plasma-Aided Manufacturing
Semiconductor Processing and Equipment
Semiconductor Post Etch Residue Cleaning, Post CMP Cleaning...

Year   Degree   Subject   Institution  
1973   PhD   Physical Chemistry   Lehigh University  
1970   MS   Physical Chemistry   Lehigh University  
1968   BS   Chemistry   Albright University  

Work History:
Years   Employer   Department   Title  

1997 to




Chemical Engineering




1991 to 1996


Lehigh University


Chemical Engineering




1978 to 1984


Lawrence Berkeley Laboratory


Materials & Molecular Research Division


Principal Investigator


1977 to 1991


University of California - Berkeley


Chemical Engineering




1982 to 1987


University of California - Berkeley


College of Chemistry


Assistant Dean of College of Chemistry


1973 to 1977


Fairchild Camera & Instrument Corporation


Process Development




Career Accomplishments:

Expert offers short courses for the Electrochemical Society, and the University of California Extension on plasma-enhanced etching and deposition.

Professional Appointments

Expert was an Associate Editor for the journal Chemistry of Materials from 1988 to 1996. He is a past Chairman of the San Francisco section of the Electrochemical Society, and was President of the Electrochemical Society, Inc., for the 1996-97 term.

Selected Publications and Publishers  
 - The Journal of The Electrochemical Society  

Consulting Services:
Recent Client Requests:
  • Expert in RIE sputter cleaning / interlayer adhesion.
  • Expert in UV radiation for consulting on possible physical and chemical mechanisms of instability in a multilayer thin film structure under UV illumination.
  • Welding expert for consulting on arcing in a plasma etcher.
  • Thin film expert for consulting on solving thin film cracking problem during sputter manufacturing.
  • Expert in Plasma (RIE etching and plasma cleaning).
  • Expert in Power Electronics.
  • Expert in coatings for consulting on a system to deposit a very thin layer onto all surfaces of a polycarbonate injection molded plastic medical device.
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

Additional Skills and Services:

Expert has been involved in technical training and seminars through professional societies, university extension programs, and on-site activities arranged directly with companies. All of these technical sessions have been centered around microelectronics process technology. This includes overall microelectronic device and integrated circuit fabrication, and especially plasma-assisted etching, deposition, polymerization, and surface modification.


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