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 Expert  108337

Expert in Plasma-Aided Manufacturing

Available for your Consulting and Expert Witness Needs

Wisconsin (WI)
Education Work History Career AccomplishmentsPublicationsConsulting Services Expert Witness

Summary of Expertise: Listed with other top experts in: 
Expert has been involved in the development of a number of features for these devices. These include the dual cell, programmed swept radio frequency excitation, external ion injection, and mass separation. He has also been able to utilize this concept directly in plasma processing devices.

Fourier transform mass spectroscopy


microfabrication microwave processing

Expert has developed numerical codes for the computation of magnetohydrodynamic and electrohydrodynamic channel flows, 3-dimensional magnetohydrodynamic equilibria and stability, three-dimensional magnetic field computations, and ballooning mode stability.

computational fluid dynamics

Expert has had a great deal of experience in fusion plasma research, including both experimental and theoretical work. His laboratory at the Expert's University-Madison operates stellarator magnetic confinement devices, which include stellarators, torsatrons, and modular stellarators. A wide variety of experimental and theoretical tools have been developed to diagnose and understand the properties of these devices. The group which he heads has also developed the capability to design and construct these devices. Expert has had 20 years of experience directing a laboratory which is involved in stellarator research. He has a large variety of tools available for use in both stellarators as well as other plasma-related activities such as manufacturing.

high-temperature plasma



Expert has expertise in plasma science and engineering, and notes that this area concerns the applications of plasmas in manufacturing. His experience involves experimental and modeling work in plasma etching and microwave processing for microelectronics, plasma deposition and polymerization, thermal plasma spraying and materials synthesis, plasma modification of materials, and plasma ion implantation. Expert is an authority on plasma-aided manufacturing and is knowledgeable regarding its applications to semiconductor fabrication, materials synthesis, welding, lighting, polymer film formation, anti-corrosion coatings, machine tools, metallurgy, electrical and electronics devices, plasma modification of materials, hazardous waste removal, and high performance ceramics. He has been instrumental in the development of a novel hazardous waste incinerator using cyclotron resonance plasmas, a mass spectrometer with remote ion source, and a method for measuring the anisotropy of a plasma in a magnetic field. He is also an authority on stellarator research and is very knowledgeable of cyclotron resonance heating.

low-temperature plasma


plasma surface treatment

Expert is concerned with the use of plasmas to develop new polymeric materials or to treat existing materials. He is familiar with the plasma formed from a monomer precursor and the resulting fragmentation of the monomeric material by electron impact. This process forms new chemicals in the gas phase and are deposited on a substrate that forms coatings which can have unusual and superior properties. The object of this work is to develop

plasma-induced polymer film formation

Expert's experience in this area includes the deposition of polymeric materials and the modification of their properties, plasma treatment of fibrous materials to improve their properties, barrier coatings, large area plasma sources, plasma deposition of silicon oxide and silicon nitride materials, and plasma diagnostics and sensor development for understanding and process control. Effective utilization of this process requires the understanding of existing and new plasma sources, such as r.f. planar electrodes, inductively coupled plasma sources, electron cyclotron resonance plasmas sources, magnetically confined sources, helicon sources, as well as a number of other plasma configurations. Each one of these plasma sources produces different results which need to be understood so that the choosing of correct equipment or the designing new equipment can be effectively done.

plasma-enhanced chemical vapor deposition

Expert has worked with plasma to modify the properties of a wide variety of materials including metals, glasses, polymers, ceramics, and semiconductors. Properties which can be modified include adhesion, sintering ability, conductivity, color, electrical properties, hardness, lubricity, resistance to solvents, biocompatibility, and photosensitivity. Effective plasma modification requires the understanding of existing and new plasma sources such as RF, planar electrodes, inductively coupled plasma sources, electron cyclotron resonance plasma sources, magnetically confined sources, helicon sources, as well as a number of other plasma configurations.

plasma physics

Expert has experience using plasmas to remove only the undesireable material from a substrate. Often this requires the use of a pattern to delineate the regions where etching should take place. He understands and applies the variety of existing and new plasma sources for plasma etching.

plasma etching

The primary goal of Expert's work is to be able to utilize plasmas in the manufacturing process. He works towards this by developing the ability to measure the plasma conditions which are necessary for insuring a particular process and then determining whether they are technically and economically feasible. The measurements of the proper plasma parameters are then used to control and to develop plasma processes for a wide range of applications. His experience involves work in plasma etching and microwave processing for microelectronics, plasma deposition and polymerization, thermal plasma spraying and materials synthesis, plasma modification of materials, and plasma ion implantation.


plasma-aided manufacturing

Expert's experience with semiconductor ion implantation has been in the application of plasmas to replace ion implantation systems for semiconductors. He has developed a new process which has the potential to eliminate impurity ions from the plasma. It promises to extend this process to even more applications in the semiconductor area.

semiconductor ion implantation

Show Secondary and Basic Areas of Expertise
Expert may consult nationally and internationally, and is also local to the following cities: Milwaukee, Wisconsin;  Madison, Wisconsin;  Kenosha, Wisconsin;  Racine, Wisconsin;  Appleton, Wisconsin;  Rockford, Illinois;  Aurora, Illinois;  Elgin, Illinois;  Waukegan, Illinois;  and Schaumburg, Illinois.

Often requested
with this expert:

Magnetron Cathode Design, Magnetic Field Modeling, PVD,...
Thin Film Science and Technology
Plasma Processing
Materials Science, Process Analytical Chemistry, Laser...

Year   Degree   Subject   Institution   Honors
1961   PhD   Electrical Engineering   Carnegie Mellon University  
1960   MS   Electrical Engineering   Carnegie Mellon University  
1958   BS   Electrical Engineering   Purdue University   Distinguished Student

Work History:
Years   Employer   Department   Title   Responsibilities

1986 to 1997


(Undisclosed University)


Center for Plasma-Aided Manufacturing




1988 to 1997


(Undisclosed University)


NSF Engineering Research Center for Plasma-Aided Manufacturing




Directed Large multidisciplinary research center whose mission was to work directly with industry on problems of national importance to improve the competitiveness of U.S. industry. The topic of the Center involved the use of charged particles in the manufacturing process-from microelectronic processing, such as deposition, implantation, etching, etc., to the more "traditional industries" such as automotive, aircraft and chemical industries.

1973 to


(Undisclosed University)


Torsatron/Stellarator Laboratory




Directed large fusion research project. Constructed and designed serveral stellarator devices whose goals are to confine plasmas to study their properties which will lead of a working fusion reactor as an energy source.

1986 to 1990


(Undisclosed University)


Department of Electrical & Computer Engineering




Elected Department Chair for a four year term. Managed 45 faculty along with an equal number of staff. The Department was the largest on Campus in terms of student enrollment.

Career Accomplishments:

Expert is a Fellow member of IEEE and the American Physical Society. He is a member of the American Association of University Professors and the American Association for the Advancement of Science. He is a Founding Member and the President of the University Fusion Association. He is the Founder of IEEE Transactions on Plasma Science.


Expert has received the Frederick Emmons Termann Award of the American Society for Engineering Education, the IEEE Nuclear and Plasma Sciences Society Merit Award, the IEEE Plasma Science and Applications Prize, the IEEE Centennial Medal, the IEEE Richard F. Shea Distinguished Member Award, and the John Yarwood Memorial Medal Presented by the British Vacuum Council.

Publications and Patents Summary

Expert holds 8 patents and has published over 300 scientific papers.

Selected Publications and Publishers  
 - Applied Physics Letters  
 - Journal of Materials Research  
 - Physical Review Letters  
 - Plasmas and Polymers  

Consulting Services:
Recent Client Requests:
  • Expert in RIE sputter cleaning / interlayer adhesion.
  • Ion sputtering expert for consulting on Ion beam and sputtering technologies.
  • Expert in Plasma (RIE etching and plasma cleaning).
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

Language Skills:
Foreign Language  

Additional Skills and Services:
Supplier and Vendor Location and Selection

Expert has experience locating vendors of the following products: * Plasma processing equipment * Microfabrication equipment * Microwave, RF, and vacuum equipment * Computers.

He has access to print materials to aid in vendor location.


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