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 Expert  108243

Expert in Microelectromechanical Systems (MEMS), Microfabrication

Available for your Consulting and Expert Witness Needs

Virginia (VA)
Education Work History Career AccomplishmentsPublicationsConsulting Services Expert Witness

Summary of Expertise:

Listed with other top experts in: 

MICROELECTROMECHANICS; MICROMACHINES; MICROELECTROMECHANICAL SYSTEMS. Expert has microelectromechanical systems (MEMS) as his primary research area. He is primarily concerned with the development of micromachines and related technologies for electronic, biomedical, and industrial applications.

MICROFABRICATION; MICROMACHINING; SILICON MICROMACHINING. Expert has had over 17 years of experience in microfabrication. This includes multiproject integrated circuit manufacture, process integration, and silicon micromachining. He is currently involved with new process technology development for microelectromechanical systems. These include thin film piezoelectric actuators and fabrication of high aspect ratio microstructures.

MEMS FABRICATION. Expert is the developer of several innovative technologies for the fabrication and application of microelectromechanical systems. These systems include micromechanical fastening systems ("micro-velcro") for joining biologic tissues; devices to inject DNA into cells; sputter deposition of piezoelectric thin films; high-aspect-ratio microstructures using anodic metal oxides; integrated MEMS using foundry supplied CMOS chips and post-processing; control of liquid bridging induced stiction using geometric tabs in released structures.










micro electrical-mechanical system


bulk silicon micromachining


integrated-circuit manufacturing


microelectronics science


semiconductor wafer processing


silicon micromachining


silicon processing

Show Secondary and Basic Areas of Expertise
Expert may consult nationally and internationally, and is also local to the following cities: Richmond, Virginia;  Alexandria, Virginia;  Roanoke, Virginia;  and Lynchburg, Virginia.

Year   Degree   Subject   Institution  
1987   PhD   Electrical Engineering   Stanford University  
1980   MEng   Electrical Engineering   Rensselaer Polytechnic Institute  
1979   BS   Electrical Engineering   Rensselaer Polytechnic Institute  

Work History:
Years   Employer   Title  

1997 to


(Undisclosed University)


Professor of Electrical Engineering and Biomedical Engineering


1993 to 1997


Carnegie Mellon University


Associate Professor


1996 to 1996


Swiss Federal Institute of Technology, Zurich


Visiting Professor


1994 to 1994


University of Twente, The Netherlands


Visiting Researcher


1987 to 1993


Carnegie Mellon University


Assistant Professor


1983 to 1987


Stanford University


Research Assistant


1980 to 1983


Hewlett-Packard Laboratories


Technical Staff


1981 to 1983


Mission College




Career Accomplishments:

Expert is a member of the American Physical Society, a Senior Member of the IEEE, and a Fellow of the Institute of Physics.

Professional Appointments

He was the General Co-Chairman of the 1996 IEEE MEMS Workshop, and is Associate Editor of the journal Sensors and Materials.


He has received many awards, including the Hertz Foundation Doctoral Thesis Prize (1988) and Presidential Young Investigator (1989).

Publications and Patents Summary

He is the author of more than 50 scientific articles and books. He has seven issued patents and one textbook on circuit analysis.

Selected Publications and Publishers  
 - Journal of Micromechanics and Microengineering  
 - IEEE International Workshop on Micro Electro Mechanical Systems, Institute of Electrical and Electronics Engineers (IEEE)  
 - BioTechniques  
 - IEEE Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE)  

Consulting Services:
Recent Client Requests:
  • Glass frit expert for consulting on bonding technology to seal two wafers for MEMS applications.
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Expert Witness Experience Summary:
He has been an expert witness in semiconductor patent disputes and other cases.
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

International Experience:
Years   Country / Region   Summary
2000 to 2000   Germany   Visiting Professor, Institute for Microsystem Technology, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany
1996 to 1996   Switzerland   Visiting Professor, Physical Electronics Laboratory, ETH Zürich, Zürich, Switzerland
1994 to 1994   Netherlands   Visiting Researcher, MESA Research Institute, University of Twente, Enschede, The Netherlands


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