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 Expert  723210

Expert in Advanced Semiconductor Lithography

Available for your Consulting and Expert Witness Needs

California (CA)
Education Work History Career AccomplishmentsPublicationsConsulting Services Expert Witness Market Research

Summary of Expertise:

Listed with other top experts in: 

Expert has worked in electron beam lithography research and application since graduate school. Specifically he developed new pattern generation techniques for improved throughput and accuracy. He also developed a new generation of electron beam mask writer. His work on the multi-beam electron beam direct-write system involved all aspects of system design. Direct-write electron beam is still a promising alternative expensive masked lithography.

electron-beam lithography


semiconductor wafer mask aligner

At Nikon, Expert developed new optical lithography concepts and installed the system in major US laboratories. He also developed many subsystem concepts for alignment and lens testing using precision mechanics and machine vision.

optical microlithography

Semiconductor lithography has evolved from contact mask lithography to the use of short wavelength light in projection or particle beams. Expert has contributed to research and application in each of these methods. His hands-on experience is with ion beams, electron beams, x-rays, and optics. Semiconductor lithography is the key to denser integrated circuits. More recent work has helped define the ultimate limits.

semiconductor lithography

In 1973, Expert developed an x-ray lithography system just one year after its first publication. His work resulted in a system for micron lithography. He worked on mask technology, x-ray sources , and alignment. Later he worked to transfer and perfect the x-ray lithography of a major industrial lab.

X-ray lithography


optical lens testing

Show Secondary and Basic Areas of Expertise
Expert may consult nationally and internationally, and is also local to the following cities: San Francisco, California;  Sacramento, California;  Oakland, California;  Stockton, California;  Fremont, California;  Modesto, California;  Santa Rosa, California;  Hayward, California;  Concord, California;  and Reno, Nevada.

Year   Degree   Subject   Institution  
1970   PhD   Electrical Engineering   University of Southern California  
1966   MS   Electrical Engineering   University of Southern California  
1964   BS   Engineering   California Institute of Technology  

Work History:
Years   Employer   Department   Title   Responsibilities

2001 to


(Undisclosed Consulting Company)





Expert has consulted in technical, marketing, and intellectual property issues regarding advanced semiconductor lithography-optical, x-ray, and electron beam. He also consults in precision mechanisms and materials especially as applied to lithography.

1998 to 2000


Ion Diagnostics Inc



Senior Scientist and Systems Manager


Expert solved system design issues and contributed to marketing and IP strategies for a multi-beam multi-column electron beam lithography system for the Next Generation Lithography requirements of the International Technology Roadmap

1990 to 1998


Nikon Research Corp of America



R and D Project Manager


Expert contributed as senior staff and program manager on advanced semiconductor lithography. His last project was the joint IBM-Nikon electron beam projection system (similar to SCALPEL). Other projects included system design, electronics, and software for an optics calibration system, machine vision for alignment and inspection, software development for picture editing, and system design for flat panel display lithography.

1986 to 2000


Nikon Precision Inc



Senior Manager


Expert was project manager for four beta test excimer laser steppers including all aspects of specification negotiation, delivery, installation, and joint evaluation. In addition he managed the demonstration and research laboratory which included designing a new 5000 square foot facility, supervision of six engineers and their projects in stepper characterization, resist evaluation, and system software

1982 to 1986


Varian Associates


Lithography Division


Engineering Manager


At Varian Expert directed the development of an X-ray lithography system with responsibility for transferring licensed technology, developing government contracts, helping create a business plan, staffing, and supervising the electronic, software, and mechanical engineering effort. He also served as acting Manager of Software Development and Support for Varian's E-beam mask making product, a position involving supervision of eight software engineers and strong customer interaction. Initially Expert managed electronics development for the Varian VLS-80 e-beam mask making system which featured a faster 80 MHz data rate, semiconductor memory, and improved overlay.

1979 to 1982


Rockwell International


Microelectronics R&D Center


Senior MTS


For Rockwell Expert established of a computerized lab for characterization of submicron CMOS-SOS and bulk IC devices and for developing programs in lithography and military radiation effects, including the VHSIC military program. Advanced lithography systems included electron beam and X-ray.

1969 to 1979


Hughes Aircraft


Hughes Research Laboratories




Expert was Program Manager and Principal Investigator for precision mask alignment contract with the US. Navy and responsible for pattern generator and applications for focused ion beam lithography. He carried out early experiments on energy losses and materials for masked ion beam lithography and co-originated a pioneer program in x-ray lithography and made major contributions to source optimization and design, to masks, to mask alignment, to resist evaluation, to process technology for IC fabrication, and to radiation effects on MOS devices. In previous work at Hughes Expert developed high power hybrid microcircuits involving circuit design, exotic materials, and analysis.

Career Accomplishments:


Professional Appointments

Treasurer IEEE Lithography Workshop

Publications and Patents Summary

He has 14 publications and 11 patents in the field of advanced lithography and material properties

Selected Publications and Publishers  
 - Society of Photographic Instrumentation Engineers (SPIE)  
 - Solid State Technology  

Consulting Services:
Selected Consulting Examples:
  • Expert worked on-site to build and check-out an accelerated test system for polymer coatings.
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Expert Witness Experience Summary:
Expert provided depositions to an intellectual property suit involving precision mechanism for semiconductor lithography and in a second case involving characterization of materials with electron beams and lasers.
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

International Experience:
Years   Country / Region   Summary
1993 to 1993   Japan   Expert implemented tests of machine vision to perform alignment of LCD flat panel lithography systems.
1995 to 1995   Japan   Expert installed and proved a lens testing system in an optics factory.

Market Research:
Expert contibuted to the marketing of advanced lithography systems to semiconductor manufacturing.

Click the green button above to contact Expert for a free initial screening call regarding your marketing research, industry research, and company research needs.  For research needs involving multiple experts or secondary research, a Research Director can be assigned to coordinate the work into a custom report for you as a potentially quicker and more cost effective alternative to doing this work yourself or hiring a boutique consultancy.  Remember, your initial screening call to speak with Expert is free.

Additional Skills and Services:
Supplier and Vendor Location and Selection

He has extensive experience in evaluating and selecting materials and vendors for ceramic structures, ceramic-metal composites, insulations, linear motors, and fiber optic components.

Other Skills and Services

Considerable experience in prior art evaluation for lithography and related semiconductor equipment.


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