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 Expert  723753

Expert in Semiconductor Post Etch Residue Cleaning, Post CMP Cleaning and CMP Slurries, Photoinitiator Process


Available for your Consulting and Expert Witness Needs

Arizona (AZ)
USA
Education Work History Career AccomplishmentsPublicationsConsulting Services Expert Witness Market Research

Summary of Expertise: Listed with other top experts in: 
Expert managed the initial stages for the ITX photoinitiator process as an applied organic chemist. He designed research parameters and the design of experiments to define process parameters and process economics. This product had annual sales of $3+ MM. Interacted with EKC Technology (now DuPont EKC Technology) as liaison chemist. Projects included developing analytical techniques for EKC265, new variations of solvent systems for hydroxylamine-based chemistries. He developed optical cleaners to meet important process and environmental constraints.

Expert also developed oxidation processes for two specialty aldehydes with projected sales of over $5 MM/yr. He developed processes for three phenolic antioxidants and two ultraviolet benzotriazole stabilizers for the plastics industry with anticipated $20 MM per year sales. He directed the development of a 2.5 MM pound per year three-step process for a hydroxylated aromatic compound and a subsequent two-step process for a generic beta-blocker pharmaceutical drug. Expert developed a process for a specialty acry¬lamide monomer with 90+% yields and low residual sulfate levels.

He also directed the development of a vapor phase heterogeneous oxidative dehydrogenation process. He established the basic catalyst composition and developed specific reaction parameters and analytical techniques. He developed an economical process for the liquid-phase reductive methylation of long chain amines and hydrazines. Projects were carried from the bench scale to the pilot plant level. Process generated $2-3 MM/yr in royalty payments.

Expert initiated the Chemical Mechanical Polishing (CMP) program for oxides and tungsten and copper metal films for EKC Technology. He was responsible for designing chemistries, setting up laboratory equipment, and establishing contact with an slurry manufacturer. Fifteen basic patents for the CMP program have been issued.

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applied organic chemistry

He initiated the CMP program for oxides and metal films. Responsible for designing chemistries, setting up laboratory equipment, and establishing contact with an slurry manufacturer. Fifteen basic patents for the CMP program have been issued. The Chemical Mechanical polishing (CMP) program were introduced, compared to only three new products in the previous two years. He managed the R&D CMP program and designed and developed five of the CMP (W, Cu, Ir, IrO2 and Pt) and two post CMP cleaning products. Interacted with customers concerning process problems related to wet chemical and CMP/post CMP processes for semiconductor wafer processing. Under his direction the number of patent applications was increased by a factor of four and more than 120 publications and conference papers (30-fold increase) had been published.
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chemical mechanical polishing

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post chemical-mechanical planarization cleaning

During the first 36 month period, twelve new products, including new fluoride, semi-aqueous chemistries and the CMP program were introduced, compared to only three new products in the previous two years for the semiconductor industry. Potential sales are $17+ MM. Managed the R&D CMP program and designed and developed five of the CMP (W, Cu, Ir, IrO2 and Pt) and two post CMP cleaning products. Expert developed a patented new post-clean treatment solvent systems, with sales projected to be $5+ MM.

Expert also developed oxidation processes for two specialty aldehydes with projected sales of over $5 MM/yr and developed processes for three phenolic antioxidants and two ultraviolet benzotriazole stabilizers for the plastics industry with anticipated $20 MM per year sales. Directed the development of a 2.5 MM pound per year three-step process for a hydroxylated aromatic compound and a subsequent two-step process for a generic beta-blocker pharmaceutical drug. Developed a process for a specialty acrylamide monomer with 90+% yields and low residual sulfate levels.

Expert modified a heteroaromatic cyclization process for a insectecide to increase yields 7-8%. The raw material costs were reduced 50% with annual savings of $1.2-1.5MM/yr. Modified a carbon-less dye process for existing plant equipment while implementing over $50M savings for the campaign.

He also directed the development of a vapor phase heterogeneous oxidative dehydrogenation process. Established the basic catalyst composition and developed specific reaction parameters and analytical techniques. Developed an economical process for the liquid-phase reductive methylation of long chain amines and hydrazines. Projects were carried from the bench scale to the pilot plant level. Process generated $2-3 MM/yr in royalty payments.

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new product development

He has had 45+ years of organic chemistry experience.
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organic chemistry

Expert is involved in the design of new cleaning chemistries and new cleaning technologies for the semiconductor industry. Also involved in Chemical Mechanical Polishing (CMP) slurry design. During the first 36 month period as R&D director at EKC Technology, twelve new products, including new fluoride, semi-aqueous chemistries and the CMP program were introduced, compared to only three new products in the previous two years for the semiconductor wafer processing industry. Potential sales are $17+ MM. Managed the R&D CMP program and designed and developed five of the CMP (W, Cu, Ir, IrO2 and Pt) and two post CMP products. He interacted with customers concerning process problems related to wet chemical and CMP/post CMP processes.

He was also a major participant in the successful commercialization of EKC265 which currently has $80+ MM in sales. Developed a patented new post-clean treatment solvent system, with sales projected to be $5+ MM.

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semiconductor wafer processing


Show Secondary and Basic Areas of Expertise
Localities:
Expert may consult nationally and internationally, and is also local to the following cities: Tucson, Arizona;  Mesa, Arizona;  Chandler, Arizona;  and Gilbert, Arizona.

Often requested
with this expert:

Thin Film Deposition, Chemical Mechanical Polishing,...
Semiconductor Processing and Equipment
Thin Film Science and Technology
Magnetron Cathode Design, Magnetic Field Modeling, PVD,...

Education:
Year   Degree   Subject   Institution  
1971   Ph. D.   Organic chemistry   University of Arizona  
1965   M.S.   Organic Chemistry   Texas Tech University  
1961   B.S.   Chemistry   Norwich University  

Work History:
Years   Employer   Department   Title   Responsibilities

2004 to 2007

 

RS Associates

 

R&D

 

CTO

 

He is the Technology Consultant for RS Associates. He is involved in developing new chemistries for post-CMP cleaning, CMP chemistries and post-etch residue removal.

1992 to 2004

 

DuPont/EKC Technologies

 

R&D

 

R&D Technical Director and CMP Technical Director

 

He held the positions of CMP Technical Director and also was the R&D Technical Director for the chemical remover (BEOL) line of business at DuPont/EKC Technology, for a total of 10 years out of a 30 year chemical career. He was involved in developing new chemistries for post-CMP cleaning, CMP chemistries and post-etch residue removal. He holds more than 30 U.S. and foreign patents and currently has ten submitted U.S. patent applications and has authored or co-authored over 120 articles and presentations including BEOL, post clean treatment, post CMP and CMP processes.

1990 to 1995

 

First Chemical Corp

 

R&D

 

Senior Research Chemist

 

He managed the technical development for the ITX photoinitiator process. Designed research parameters and the design of experiments to define the process and its economics. This product had anticipated annual sales of $3+ MM. He interacted with EKC Technology as liaison chemist. Project development included developing analytical techniques for EKC265, new solvent variations for hydroxylamine-based chemistries. Developed optical cleaners meeting important process and environmental constraints. Recipient of the first “Technical Catalyst Award” in 1994.

1985 to 1990

 

Wesley Industry

 

R&D

 

Research Director

 

He managed the corporate laboratory and two plant laboratories and coordinated Wesley projects at three off-site research groups. The personnel varied from four to eleven people. Developed oxidation processes for two specialty aldehydes with projected sales of over $5 MM/yr. Developed processes for three phenolic antioxidants and two ultraviolet benzotriazole stabilizers for the plastics industry with anticipated $20 MM per year sales. Directed the development of a 2.5 MM pound per year three-step process for a hydroxylated aromatic compound. Developed a process for a specialty acrylamide monomer with 90+% yields and low residual sulfate levels.

1980 to 1985

 

Ciba-Geigy Corp

 

Process Development

 

Project Leader

 

He eliminated a special catalyst for production of Diazion, an agrochemical insecticide. Production rates were increased by 10% with an annual catalyst savings of $0.3 -0.5 MM/yr. at production rates of 10-16 MM pounds/yr. Modified a heteroaromatic cyclization process to increase yields 7-8%. The raw material was reduced 50% with annual savings of $1.2-1.5MM/yr. He modified a carbon-less dye process for existing plant equipment while implementing over $50M savings for the campaign.

1974 to 1980

 

Ashland Chemical Co

 

R&D

 

Sr. Research Chemist

 

He directed the development of a vapor phase heterogeneous oxidative dehydrogenation process. Established the basic catalyst composition and developed specific reaction parameters and analytical techniques. Developed an economical process for the liquid-phase reductive methylation of long chain amines and hydrazines. Projects were carried from the bench scale to the pilot plant level. Process generated $2-3 MM/yr in royalty payments. Supervised a 3-4-member group of chemists.

1973 to 1974

 

Celanese Chemical Co.

 

R&D

 

Research Chemist

 

He conducted exploratory research for new vapor phase heterogeneous processes for the oxidation of olefins. Also worked on the liquid phase homogenous and heterogeneous oxidation of olefins and aldehydes.


Career Accomplishments:
Associations/Societies

American Chemical Society, Electrochemical Society, Royal Chemical Society. Sigma Xi

Awards/Recognition

Recipient of the first “Technical Catalyst Award” in 1994 from First Chemical Corp.


Publications:
Publications and Patents Summary

He holds more than 30 U.S. and foreign patents and currently has ten submitted U.S. patent applications and he has authored or co-authored over 120 articles and presentations including BEOL, post clean treatment, post CMP and CMP processes. He is also co-author of two chapters in the 2nd edition of "Handbook of Silicon Wafer Cleaning Technology" edited by Karen Reinhardt and Werner Kern

Selected Publications and Publishers  
 - William Andrew  
 - Elsevier, Amsterdam  
 - Ultra Clean Processing of Silica Surfaces  
 - SEMI Technology Symposium  

Government Experience:
Years   Agency   Role   Description
1972 to 1975   U.S. Army   Research Chemist   Developed methods to destroy a variety of chemical weapons.

Consulting Services:
Selected Consulting Examples:
  • He has worked with clients to evaluate process problems for a post etch residue cleaner products for semiconductor processes.
  • He has working with other clients to develop viable abrasive slurry products for the CMP market.
  • He is working with another client to develop a completely new method of removing particles from wafers with very small quantities of chemicals.
Recent Client Requests:
  • Expert in Etching (cleaning) silicon.
  • Expert in CE Marking and ATEX information for battery powered in coal mine.
  • Expert in Semiconductor chemicals for consulting on materials business opportunities, and strategy development.
  • Flex circuit expert for consulting on flexible circuit materials.
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

International Experience:
Years   Country / Region   Summary
1994 to 2004   Asia   Consulted with customers about wafer cleaning problems and CMP polishing problems.
1994 to 2004   Europe   Consulted with customers about wafer cleaning problems and CMP polishing problems.

Market Research:
Follow the technical trends for wafer cleaning and polishing processes.

Click the green button above to contact Expert for a free initial screening call regarding your marketing research, industry research, and company research needs.  For research needs involving multiple experts or secondary research, a Research Director can be assigned to coordinate the work into a custom report for you as a potentially quicker and more cost effective alternative to doing this work yourself or hiring a boutique consultancy.  Remember, your initial screening call to speak with Expert is free.

Additional Skills and Services:
Training/Seminars

I have taught a number of course on back end of line cleaning (post etch residues) and post CMP cleaning in the semiconductor industry.

Supplier and Vendor Location and Selection

Helping clients find suppliers for CMP abrasives and chemicals and also chemicals for wafer cleaning applications.


 

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