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 Expert  724956

Expert in Nanomanufacturing Processes

Available for your Consulting and Expert Witness Needs

Education Work HistoryPublicationsConsulting Services Expert Witness Market Research

Summary of Expertise: Listed with other top experts in: 
Expert has 20 + years of experience in technical and business aspects of nanomanufacturing. He has been involved in the implementation of thin film technologies in various devices such as semiconductors, sensors, magnetic recording heads, displays (OLEDS,TFT),HB-LED, photovoltaics (CIGS,..) , EUV etc. He has a good understanding of industry practices, and an extensive network of contacts. He has a thorough understanding of unit processes ( PVD, MOCVD,PECVD,ALD, IBD,MBE,PLD,RIE,IBE, CMP, Litho,...) in terms of performance & limitations of commercially available equipment. He has also worked on process integration, and its implications for device performance, yield, uniformity, cost structure, equipment uptime, fab utilization etc,..

Expert has extensive experience working with industrial and financial actors concerning M&A and investment-related due diligence, technology roadmapping, evaluation of manufacturability of new devices ( assessment of business plan,IP evaluation), competitive benchmarking, development of an industrialization strategy, etc....




semiconductor processing equipment


thin-film process development


thin-film technology


lift-off (semiconductor fabrication)


micro electrical-mechanical system




organic light-emitting diode


thin-film photovoltaic cell


photovoltaic selenium cell

Expert worked on several aspects of ALD, including:

1) Equipment design : Expert has designed and simulated (CFD, thermal) several high throughput ALD reactors. He has a thorough understanding of gas flow patterns, which leads him to propose innovative design features . He has a good understanding of the IP in the field (assessment of possible infringement) and has also created IP (see e.g. US patent 707118 B1). ALD equipment designed by expert has been in use for years in a leading high volume manufacturing environment. Design of precursor trap to optimize pump lifetime.

2) Process Development & Continuous improvement : Expert has been involved in process development & continuous improvement of ALD dielectrics, including electrical ( C-V probe), optical and structural characterization of films Uniformity, throughput, step coverage , micro contamination optimization.

3)Expert has been involved in business related subjects relative to ALD, including : marketing, sales support, technical due diligence, technology portfolio analysis, road-mapping, technology transfer. He has a good understanding of industry practices, and an extensive network of contacts.


atomic layer deposition

Expert has 20+ years of experience in ion-based etching. Areas of expertise include:

1) Equipment Design and Operation Expert has hands-on and managerial experience in ion source and ICP reactor design, operation and maintenance, gasbox design, in-situ metrology , troubleshooting of equipment malfunction 2) Process Optimization Expert has extensive hands-on and managerial experience with process qualification, advanced process control, uniformity, repeatability optimization, process integration in an industrial context

3) Physics of the sputtering process: Sputter yields, halogen-surface interaction, damage, redeposition, reflected neutrals,.. Expert has performed extensive research on beam-surface interaction, Molecular dynamics modeling

4)Marketing, sales support, technical due diligence, technology portfolio analysis, roadmapping, technology transfer. He has a good understanding of industry practices, and an extensive network of contacts.


ion etching


ion-beam etching


plasma etching


nonreactive ion etching


aluminum oxide etching

Expert has more than 15 years of experience and in-depth knowledge on metal and insulator deposition by sputter based deposition techniques. Areas of expertise include :

1)Development, of industrial PVD equipment, process engineering and continuous improvement for production-level applications in several industries such as semiconductor (Cu, Ta, TaN ) RF-MEMS & wireless ( AlN FBAR, Pt/Ti metallization for), data storage (GMR, TMR, high moment, Al2O3 etc), EUV, CIGS photovoltaics ( Mo, TCO,CIGS), etc. Expert was leading development of the first generation GMR deposition tool and process for hard disk manufacturing at CVC products. This equipment took about 80 % marketshare in 18months, in an application that is generally considered to be one of the first industrial applications of nanotechnology (See e.g. 2007 Physics Nobelprize press release)

2)Thorough knowledge and modeling experience of fundamental physics of plasma formation, plasma surface interaction and film formation process ( 20 yrs experience ; 70+ publications including 16 invited reviews). Hands on experience with : Mass spectrometry, in-situ sensors,emission spectroscopy, Langmuir Probe, Molecular Dynamics, Particle In Cell, FEA,..

3)Extensive experience qualifying, troubleshooting and continuously improving PVD process in a manufacturing environment. Uniformity, repeatability, equipment malfunction, contamination, material property optimization,... etc. On-site crisis resolution (root cause analysis,...

4)Marketing, sales support, technical due diligence, technology portfolio analysis, road-mapping, technology transfer. He is well respected in industry, and has given several invited talks at leading conferences (SVC,AVS) on the subject.He has a good understanding of industry practices, and an extensive network of contacts.


DC sputtering


tungsten sputtering


ion sputtering


titanium sputtering


sputter deposition


sputtering target


magnetron sputtering


radio-frequency sputtering


diode sputtering


chromium sputtering


copper sputtering


molybdenum sputtering

Expert is recognized as one of the world leading experts in magnetic thin film processing:

1) Processing : Expert has been involved in industrial implementation of several magnetic thin film materials such as AMR, GMR,NOL-GMR, TMR, hard bias, high moment, for applications such as magnetic recording heads, magnetic field sensors, IC-integrated magnetic coils, MRAM. Every single hard disk head manufacturer uses or has used one or more magnetic film deposition or etch process to which expert has contributed.

2) Device Design : Expert has had several years experience performing electrical and magnetic device characterization, leading to IP generation ( several US patents on magnetic devices).

4) Science : Expert has been very active in the scientific community,with numerous papers and conference contributions. Expert has thorough knowledge of preparation and metrology of magnetic thin films. He has thought a course on magnetic film processing at semizone.com, web based training in association with Stanford.


ferromagnetic film


magnetic thin film


magnetic film

Expert has been involved in the development and operation of high vacuum and ultra high vacuum systems for over 20 years, from hands on experience building R&D systems to management of an engineering team building industrial systems. Specific areas of expertise involve:

1) Design and Engineering of System : Materials & components ( O-rings, valves, feedthroughs ,..) pumping schemes ( cryo, turbo, ion, getter, water,..), bake-out procedures , gauges(ion gauge, baratron(R), QMS,..) , control systems ( PLC, profibus,..)

2) Implementation of (U)HV in a manufacturing environment : feasibility, best practices ( training of technicians ), comprehensive contamination control ( gas purification systems,..).

3) Computer aided design of gas injection systems and showerheads. (CFD, DSMC)


ultra-high vacuum system


high vacuum


high vacuum system


vacuum outgassing


ultra-high vacuum

Expert has extensive experience modeling ballistic, rarefied and continuum gas transport using CFD Monte Carlo techniques.

He developed several Monte Carlo codes, including a 3D dsmc code on unstructured grids, fully compatible with CAD interfacing, specially adapted for the application on vacuum process equipment. He has a thorough hands-on knowledge of state of the art CFD ( finite volume techniques).

He has performed analysis and design of gas flow in many systems, including ALD, CVD, PVD, MBE,PLD,etc... He is well respected in industry, and has given several invited talks at leading conferences (SVC,AVS) on the subject.


direct simulation monte carlo


computational fluid dynamics


fluid dynamics


fluid mechanics modeling


gas dynamics

Show Secondary and Basic Areas of Expertise

Often requested
with this expert:

Magnetron Cathode Design, Magnetic Field Modeling, PVD,...
Thin Film Deposition, Specializing in Reactive Sputtering
Adhesion Bonding, Plastic Surface Treatments, Plastics...
Display Materials, Lamp Materials, Electronic Materials...

Year   Degree   Subject   Institution  
1992   PhD   Technical Physics   Eindhoven University of Technology  
1986   Masters   Physics & Materials Science   Antwerp University  

Work History:
Years   Employer   Department   Title  

2004 to 2007


In Silicio



co-founder, General Manager


1999 to 2004


Veeco Instruments


Process Equipment Division


VP Technology / Sr Director Strategic Marketing / Senior Scientist


1997 to 1999







1986 to 1997






Research Scientist


Publications and Patents Summary

He has more than 70 papers, including 16 invited reviews, as well as 10 US patents.

Consulting Services:
Selected Consulting Examples:
  • A VC fund was considering an investment in a vacuum process equipment company and contacted the expert in their due diligence process. In a series of telephone conversations , he provided a second opinion on the background of the principals, the market sizing, and the technical risks involved in the project. He also performed a critical assessment of relative strengths and weaknesses with respect to the competition.
  • A manufacturer of electronic components received a new piece of manufacturing equipment. When installed in the fab, the equipment was not meeting its specs. After 3 weeks of trial and error no improvement was obtained. As the end of the quarter loomed, further delay of the acceptance would jeopardize quarterly revenue numbers for the supplier. The expert starts working with the engineering staff to build a logical tree pointing to the root cause of the problem. This leads to a hypothesis being formulated within hours after contacting the expert. The expert travels to the customer site, and assist customer personnel to perform the tests that prove this hypothesis to be true, leading to immediate issue resolution and equipment sign off.
  • Researchers at an independent research organization have made some basic discoveries that they consider to be of importance for future applications. Expert works with the technology valorization structure within the organization to : 1) Assist in generating a vision for industrial fabrication of the invention. Provide a second opinion on input of equipment suppliers. 2) Assist in generating a coherent IP portfolio 3) Identify gaps in the present state of knowledge and suggests paths to bridge these gaps.
Recent Client Requests:
  • Magnetic modeling expert for consulting on EM Modeling.
  • Sputtering expert for consulting on sputtering target.
  • Expert in Plasma (RIE etching and plasma cleaning).
  • Expert in OLED for consulting on OLED.
  • Expert in zirconium-based oxygen sensor for consulting on design and performance optimization.
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Recent Litigation Client Requests:
  • Plasma sputtering expert for litigation case.
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

International Experience:
Years   Country / Region   Summary
1986 to 1997   Netherlands   Worked for 11 years at Philips Research in Eindhoven, The Netherlands
1964 to 1997   Belgium   Was born and grew up in Belgium
1997 to 2004   USA/ Silicon Valley   Spend about 7 1/2 years in Silicon Valley. Extensive travel to APAC ( More than 30 trips )
2004 to   France   Now living in France for more than 3 years

Language Skills:
Foreign Language   Description
Dutch   Mother Tongue
English   After more than 20 years of professional use, and more than 7 years living in the US, he is fluent in English.
French   After growing up in bilingual Belgium, having a French spouse, and more than three years living in France, he is fluent in French.

Market Research:
10 years of strategic marketing technology roadmapping for vacuum etch and deposition equipment and processes. Industry analysis for Data Storage, specialty semiconductor / MEMS , solid state lighting , photovoltaic , OLED, architectural glass

Extensive network (> 500 contacts) in semiconductor, data storage, photovoltaics industries,..

Click the green button above to contact Expert for a free initial screening call regarding your marketing research, industry research, and company research needs.  For research needs involving multiple experts or secondary research, a Research Director can be assigned to coordinate the work into a custom report for you as a potentially quicker and more cost effective alternative to doing this work yourself or hiring a boutique consultancy.  Remember, your initial screening call to speak with Expert is free.

Additional Skills and Services:

Member of faculty of Semizone.com ( web based learning in association with Stanford)

Internal training courses on PVD, thin film characterization , magnetic head processing etc in Veeco

About 40 talks at scientific conferences, including invited presentations at : American Vacuum Society , Society of Vacuum Coaters ( 2x), Intermag conference (2x), ICMTFS, ...

Seminars on advanced topics at Tohoku University ( 2x) , Lawrence Livermore Labs ( 2x), UC Berkeley (2x), Columbia Univ(2x), Los Alamos,

Supplier and Vendor Location and Selection

Worked for more than 20 year as customer, competitor or supplier of different industrial actors in vacuum etch and deposition equipment industry ( ALD, CVD, IBE, IBD, MBE, PVD, RIE). Thorough understanding of technical and business aspects.

Other Skills and Services

Due Diligence for Investors: 1) Involved in due diligence for M&A activities at Veeco 2) Entrepreneurial experience at In Silicio


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