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 Expert  728316

Expert in Magnetron Cathode Design, Magnetic Field Modeling, PVD, Sputtering, Ion Beam Etch, Vacuum Technology


Available for your Consulting and Expert Witness Needs

California (CA)
USA
Education Work HistoryPublicationsConsulting Services Expert Witness Market Research

Summary of Expertise: Listed with other top experts in: 
Expert has developed and supported production thin film sputtering systems and processes since 1989. He has led the development and deployment of a production PVD cluster tool used by the IC, MEMS, and magnetic memory industries. He developed one of the first production low-temperature aluminum metallization processes in 1993, integrated with a novel titanium nitride (TiN) barrier deposition process that he also developed. He has written and developed software to predict system throughput, heating uniformity, and sputter deposition uniformity - all of which he has applied to developing successful sputter module designs. He is an expert user of magnetic field modeling (Magneto) and thermal modeling (Comsol) software packages, and has used them to optimize physical vapor deposition systems and processes. Expert has a strong background in deposition technology that has led him to work on issues in MOCVD, and HVPE. He is the primary or sole inventor for seven U.S. Patents on thin film system and process.
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DC sputtering

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deposition technology

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ion sputtering

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magnetron

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magnetron sputtering

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physical vapor deposition

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radio-frequency sputtering

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sputter deposition

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thin-film deposition

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argon sputtering

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aluminum sputtering

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cathode

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deposition

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reactive sputtering

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copper sputtering

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diode sputtering

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magnetron theory

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gold sputtering

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ion-beam etching

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ion etching

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planarization

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sputtering target

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semiconductor metallizing

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planar magnetron

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thin-film process development

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titanium nitride

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tungsten sputtering

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titanium sputtering

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vacuum deposition

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coating

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compound semiconductor material

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film

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metal film

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semiconductor wafer processing

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silicon nitride

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thin film

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thin-film coating process

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thin-film conductor

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titanium nitride film

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titanium nitride physical vapor deposition

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titanium nitride thin film

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vacuum system design

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vacuum leak testing

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vacuum leak detection

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high-vacuum technology

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high vacuum


Show Secondary and Basic Areas of Expertise
Localities:
Expert may consult nationally and internationally, and is also local to the following cities: Los Angeles, California;  Long Beach, California;  Bakersfield, California;  Glendale, California;  Oxnard, California;  Santa Clarita, California;  Pomona, California;  Torrance, California;  Pasadena, California;  and Lancaster, California.

Often requested
with this expert:

Thin Film Deposition, Specializing in Reactive Sputtering
Optical Coatings, Vacuum Engineering, Ion Beam and...
Thin Film Science and Technology
Nanomanufacturing Processes

Education:
Year   Degree   Subject   Institution  
1989   Master of Science   Physics   Utah State University  
1986   BS   Physics   University of California, Santa Barbara  

Work History:
Years   Employer   Department   Title   Responsibilities

2005 to

 

(Undisclosed)

 


 

Managing Member

 

He is primary consultant on all deposition, vacuum science, and material science issues.

2004 to 2005

 

Tegal Corporation

 

PVD Products Group

 

VP, General Manager

 

Overall responsibility for two sputtering system product lines.

1999 to 2004

 

First Derivative Systems, Inc.

 


 

President/CEO

 

Founder and overall manager of a startup PVD company that built and demonstrated a 300-mm PVD system.

1989 to 1999

 

Sputtered Films, Inc.

 


 

VP, Engineering

 

Overall development of sputtering processes and systems.


Publications:
Publications and Patents Summary

He has several publications on material science, thin film, and vacuum technology. He has seven U.S. Patents on thin film technology and system design.


Government Experience:
Years   Agency   Role   Description
1987 to 1989   DOE - LANL   Lab/Grad Fellow   Research into binary and ternary alloy systems at the Center For material Science, under Ricardo Schwarz, at Los Alamos National Lab. Q clearance.

Consulting Services:
Selected Consulting Examples:
  • He wrote narrative sections and framework for a DOE grant proposal that resulted in a grant award for the client of $4 million.
  • He developed concepts and compiled existing work into an "omnibus" provisional patent application for a complex capital equipment system under development by a client.
  • He analyzed a reactive sputtering system and helped to pinpoint areas for potential improvement, resulting in solutions to client's customer issues.
  • He analyzed and developed a set of designed experiments to optimize an ion beam process. He stabilized and brought fab maintenance issues under control by helping the maintenance people write standard work instructions.
  • He refined and summarized the narrative for a trade secrets litigation, responses to interrogatories, developed deposition questions, and provided general assistance in the management of technical details.
Recent Client Requests:
  • Ion sputtering expert for consulting on Ion beam and sputtering technologies.
  • Expert in Precursors.
  • Expert in chrome sputtering usa for consulting on NFL Headquarters in NYC.
  • Expert in One day brainstorming session at clients facility.
  • Expert in Plasma (RIE etching and plasma cleaning).
  • Metallization expert for consulting on Evaporated AuSn.
  • PVD/CVD expert to provide technical due dillegence.
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Expert Witness Experience Summary:
He was expert agent in a trade secrets lawsuit that led to a settlement in favor of his client, the plaintiff. He reviewed technical files, developed questions to be used in deposition, attended depositions, advised on demands and responses for materials, etc. This assignment lasted 10 months, and ended on the evening of jury selection, when the defendant offered $19M to settle.
Recent Litigation Client Requests:
  • Plasma sputtering expert for litigation case.
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

International Experience:
Years   Country / Region   Summary
1994 to 2004   Europe   Frequent travel in support of sales efforts, and to provide customers with technical assistance.
1997 to 2005   Asia   Frequent travel in support of sales efforts, and to provide customers with technical assistance.

Market Research:
Expert is a veteran of the semiconductor capital equipment industry, knows many of the key suppliers, customers, and competitors.

Click the green button above to contact Expert for a free initial screening call regarding your marketing research, industry research, and company research needs.  For research needs involving multiple experts or secondary research, a Research Director can be assigned to coordinate the work into a custom report for you as a potentially quicker and more cost effective alternative to doing this work yourself or hiring a boutique consultancy.  Remember, your initial screening call to speak with Expert is free.

Additional Skills and Services:
Other Skills and Services

Expert has done patent research and written patent specifications and grant proposals for his clients.


 

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