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 Expert  729697

Expert in Plasma Processing

Available for your Consulting and Expert Witness Needs

California (CA)
Education Work History Career AccomplishmentsPublicationsConsulting Services Expert Witness

Summary of Expertise: Listed with other top experts in: 
Expert is a recognized expert in plasma etching as encountered in microstructure fabrication (e.g., integrated circuits) and for over 30 years has been teaching a two-day technical training course entitled "Plama Etching and Reactive Ion Etching." He was employed at the IBM Almaden Research Center for 25 years carrying out basic research in these and related areas and since his retirement has been collaborating with a professor at UC Berkeley in the area of plasma-surface interactions.

gas plasma


material processing


microfabrication microwave processing


microwave plasma processing


plasma chemical process


plasma chemistry


plasma cleaning


plasma processing


plasma surface treatment


plasma-aided manufacturing


semiconductor material processing


silicon processing


surface treatment


thin-film processing

Show Secondary and Basic Areas of Expertise
Expert may consult nationally and internationally, and is also local to the following cities: San Jose, California;  San Francisco, California;  Sacramento, California;  Oakland, California;  Stockton, California;  Fremont, California;  Modesto, California;  Salinas, California;  Santa Rosa, California;  and Hayward, California.

Often requested
with this expert:

Plasma-Aided Manufacturing
Thin Film Science and Technology
Magnetron Cathode Design, Magnetic Field Modeling, PVD,...
Materials Science, Process Analytical Chemistry, Laser...

Year   Degree   Subject   Institution  
1967   PhD   Electrical Engineering   University of Minnesota  
1958   MASc.   Physics   University of British Columbia  
1956   BASc   Engineering Physics   University of British Columbia  

Work History:
Years   Employer   Department   Title   Responsibilities

1968 to 1993




Research Division


Research Staff Member and Manager


Supervise a group of research scientists and technicians and individually carry out research in plasma science.

Career Accomplishments:

American Vacuum Society

Professional Appointments

American Vacuum Society (AVS) President 1988; AVS Treasurer 1999-2006.


Nishizawa Award from Dry Processing Symposium in Japan (2010); AVS Expert Thornton Memorial Award (1993); Alexander von Humboldt Senior Scientist Award (1993-4); AVS Honorary Member (1991); Tegal "Thinker" Award (1983).

Publications and Patents Summary

Has about 110 papers published in refereed journals.

Consulting Services:
Selected Consulting Examples:
  • Expert has consulted with dozens of companies dealing with problems and/or new approaches in microfabrication technologies. Most of these consulting jobs have been on-site with the company and have been short term (1-4 visits). A few have required many visits over a period of a year or so. Most of these consultations have involved proprietary issues.
Recent Client Requests:
  • Expert in RIE sputter cleaning / interlayer adhesion.
  • Expert in Plasma (RIE etching and plasma cleaning).
  • Expert for consulting on ICP and RIE
Click the green button above to contact Expert for a free initial screening call regarding your expert consulting needs.  Expert is available for consulting to corporate, legal and government clients.  Remember, your initial screening call to speak with Expert is free.

Expert Witness:
Expert Witness Experience Summary:
Expert witness in several ITC and other courts - a few court appearances and some depositions , expert reports, etc.
Click the green button above to contact Expert for a free initial screening call regarding expert testimony, litigation consulting and support, forensic services, or any related expert witness services.  A few litigation needs include product liability, personal injury, economic loss, intellectual property (patent, trademark, trade secret, copyright), and insurance matters.  Remember, your initial screening call to speak with Expert is free.

International Experience:
Years   Country / Region   Summary
1993 to 1994   Germany   Alexander von Humboldt Senior Scientist Award to the Fraunhofer Institute for Applied Solid State Physics in Freiburg, Germany.
to   Many   Technical training course presented in many countries (Canada, Mexico, Brazil, Germany, France, China, Czech Republic, Switzerland, UK, Israel, Korea, Malasia, Singapore)

Additional Skills and Services:

Developed and presented a two-day technical training course entitled "Plasma Etching and Reactive Ion Etching." Expert has presented this course ver 300 times to thousands of attendees, nationally and internationally.


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