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borophosphosilicate glass

  

glass

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tetraethoxysilane

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reflowing

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integrated-circuit packaging process

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silicon oxide

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integrated circuit

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chemical vapor deposition

 

Borophosphosilicate Glass Experts

The following experts are available as borophosphosilicate glass consultants and borophosphosilicate glass expert witnesses.  ORC experts are peer-recommended authorities who have been carefully selected and rigorously screened.
    Definition:  Borophosphosilicate Glass - A ternary silicate glass consisting of the oxides of silicon, boron, and phosphorous. It is a very good insulator and is used for planarization in integrated circuit processing. It is usually deposited by chemical vapor deposition, and is heated to soften it in order to make it flow. After etching it is reflowed.

Synonyms:  BPSG

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Expert in Semiconductor Transistor & BEOL Technology (Logic,Memory,CIS,Power device) & Photovoltaic Technology
Expert is an expert in the Chemical Vapor Deposition (CVD) and Chemical Vapor Deposition Reactor design areas. His PhD work was on Metal Organic Chemical Vapor Deposition of GaAs, which involved the design and construction of an Atmospheric Pressure ... See full profile

California (CA), USA

 
 

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