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reactive ion etching


ion etching


semiconductor wafer contact etching


nonreactive ion etching


Reactive Ion Etching Experts

The following experts are available as reactive ion etching consultants and reactive ion etching expert witnesses.  ORC experts are peer-recommended authorities who have been carefully selected and rigorously screened.
    Definition:  Reactive Ion Etching - An ion-etching process in which an electric field causes energized ions to hit perpendicularly on a semiconductor substrate. The etching process is both chemical and physical, since the energized ions react with the material to be etched and use momentum transfer. Used in the manufacture of integrated circuits.

Synonyms:  reactive sputter etching, RIE

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Expert in Nanomanufacturing Processes
Expert has 20 + years of experience in technical and business aspects of nanomanufacturing. He has been involved in the implementation of thin film technologies in various devices such as semiconductors, sensors, magnetic recording heads, displays ... See full profile


Expert in Thin Film Deposition, Specializing in Reactive Sputtering
Expert has extensive experience in magnetron sputtering of aluminum and in the high-rate reactive sputtering of aluminum compounds such as aluminum oxide. He was the first to show that aluminum oxide with excellent film ... See full profile

California (CA), USA

Expert in Thin Film Science and Technology
Thin film applications; thin film integrated circuit. The majority of Expert's academic, industrial, and research experience has been thin film science and technology. Although most of his experience has been in the microelectronics (semiconductor) ... See full profile

Georgia (GA), USA

Expert in Engineering Systems Design & Development: SAW Sensors, Cleanrooms, VLSI Technology, Photolithography
Expert began research in computational mechanics of fibre-reinforced composite materials through which he obtained his PhD. With this background, he explored other advanced materials like piezoelectrics. Piezoelectric materials are essential for the ... See full profile

Bexley, NSW, Australia

Expert in Plasma Processing
Expert is a recognized expert in plasma etching as encountered in microstructure fabrication (e.g., integrated circuits) and for over 30 years has been teaching a two-day technical training course entitled "Plama Etching and Reactive Ion Etching. See full profile

California (CA), USA

Expert in Microelectronics, Nanotechnology, Semiconductors, Memory
Expert has nearly 10 years of experience in solid state device development in a wide range of material systems. As a senior process engineer at Global Communication Semiconductors, he has provided internal advice about epitaxial layer selection from ... See full profile

California (CA), USA

Expert in High Power Lasers and Laser Optics
Expert is an expert in optics for high power lasers, more specifically CO2, solid-state and fiber lasers. He concentrated on resonator optics and their proper coatings to minimize thermal aberrations and maintain high laser beam quality. See full profile


Expert in Technical Marketing, New Product Development & Launch, Materials Physics
Heat transfer across interfaces and through particulate-filled composite materials (solids and liquids) was one of his primary areas of research while at 3M Company. His work included development of heat transfer products for use in electronic equipment ... See full profile

Minnesota (MN), USA

Expert in Nanotechnology, Clean-Tech, Due Diligence for Venture Capital Financing
Expert holds a Ph.D. in Chemical Engineering from the California Institute of Technology, as well as a B.S. in Chemical Engineering (summa cum laude) from the University of California, Irvine. He was awarded the American Institute of Chemical ... See full profile

California (CA), USA

Expert in Thin Films, Vacuum Technology, thin film resistors, semiconductor processing
Expert has over 25 years experience in all areas of physical vapor deposition. He is experienced in vacuum and sputter deposition, as well as reactive and diode sputtering. He heads a company offering services and manufacturing in this area, ... See full profile

New York (NY), USA

Expert in Electron Microscope, Light Microscopy, EBEAM Lithography and Nanofabrication, Scanning Electron
Expert has extensive experience in designing, implementing, troubleshooting, and interpreting experiments involving novel applications in all fields of biological microscopy (TEM, SEM). He also has expertise in confocal, fluorescence, DIC ... See full profile

Pennsylvania (PA), USA

Expert in Semiconductor Devices, Testing and Product Engineering, Marketing and Administration
Expert has spent most of his career in the semiconductor device and process technology areas. His experience is wide, with exposure to germanium and silicon discrete to large scale silicon integrated devices in the sub-micron regime. See full profile

California (CA), USA


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